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Copyright 2000, 2001 Society of Photo-Optical Instrumentation Engineers. The following papers are made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited.

  1. "Redefining Critical in Critical Dimension Metrology" , Proceedings of SPIE,
        Vol. 4344, 815 (2001) Download pdf file (230kB) .
  2. "The Importance of Measurement Accuracy in Statistical Process Control" , Proceedings of SPIE,
       Vol. 3998, 546 (2000). Download pdf file (85kB)



  1. MetroCal Brochure   Download pdf file (17kB) 


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