Overlay Booster is available from Nanometrics, Inc. for real-time operation with IVS 185™, 165, 135, 130 and 120 Overlay metrology tools.  Please visit IVS 185 web page for additional information.

To obtain a real-time software license, you can contact Nanometrics, Inc. directly.  For a directory of worldwide office locations, please visit Nanometrics contact page.